JPH0269961U - - Google Patents
Info
- Publication number
- JPH0269961U JPH0269961U JP14909488U JP14909488U JPH0269961U JP H0269961 U JPH0269961 U JP H0269961U JP 14909488 U JP14909488 U JP 14909488U JP 14909488 U JP14909488 U JP 14909488U JP H0269961 U JPH0269961 U JP H0269961U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- pass
- attached
- outer cover
- evaporation tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000011362 coarse particle Substances 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14909488U JPH0269961U (en]) | 1988-11-17 | 1988-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14909488U JPH0269961U (en]) | 1988-11-17 | 1988-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0269961U true JPH0269961U (en]) | 1990-05-28 |
Family
ID=31421012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14909488U Pending JPH0269961U (en]) | 1988-11-17 | 1988-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0269961U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004137583A (ja) * | 2002-10-21 | 2004-05-13 | Tohoku Pioneer Corp | 真空蒸着装置 |
| JP2005200767A (ja) * | 2004-01-14 | 2005-07-28 | Applied Films Gmbh & Co Kg | 昇華性材料のための蒸発装置 |
-
1988
- 1988-11-17 JP JP14909488U patent/JPH0269961U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004137583A (ja) * | 2002-10-21 | 2004-05-13 | Tohoku Pioneer Corp | 真空蒸着装置 |
| JP2005200767A (ja) * | 2004-01-14 | 2005-07-28 | Applied Films Gmbh & Co Kg | 昇華性材料のための蒸発装置 |